University of Bern

Institute of Applied Physics


Details of Publication IAP ID 3951

Type:Conference Proceedings
IAP ID:3951
Authors:Eugenie Kirk, Anna Mustonen, Ekaterina Pomjakushina, Stefan Ritter, Jens Gobrecht, Soichiro Tsujino
Title:Smoother Mo films for molded FEAs by addition of N2 to Ar sputter gas
Title of proceedings:IEEE Conference Publications, The 24th International Vacuum Nanoelectronics Conference (IVNC), Germany
Volume:ISBN: 978-1-4577-1243-2

Webmaster IAP | IAP home