University of Bern

Institute of Applied Physics

Publications

Details of Publication IAP ID 3894

Type:Posters
IAP ID:3894
Authors:Mabel Ruiz-Lopez, Felix Staub, Leili Masoudnia, Fei Jia, Jürg Balmer, Davide Bleiner
Title:Coherent Short-Wavelength Plasma Light for Extreme Ultraviolet Metrology
Conference:SPIE Advanced Lithography
Place:San Jose
Start date:12 Feb 2012

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