University of Bern

Institute of Applied Physics

Publications

Details of Publication IAP ID 2901

Type:Articles in Journals
IAP ID:2901
Authors:Matthias Meier, Dietmar Bertsch, Nico Onda, Marco Etter, Martin Gutsche, Alex Dommann, Valerio Romano, Marc-A. Nicolet
Title:Laser Trimming of Amorphous Ta42Si13N45 Thin Films with Ultrashort Pulses
Journal:Microelectronic Engineering
Editor:J. Torres, R. Mader and B. Chenevier
Volume:83
Number:11-12
Pages:2234-2237
doi:10.1016/j.mee.2006.10.010
Year:2006
Status:published
pdf:[0.43 MB]

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