University of Bern

Institute of Applied Physics


Details of Publication IAP ID 2735

IAP ID:2735
Authors:Matthias Meier, Valerio Romano, Dietmar Bertsch, Nico Onda, Marco Etter, Martin Gutsche, Alex Dommann, Marc-A. Nicolet
Title:Laser Ablation of Amorphous Ta42Si13N45 Thin Films
Conference:Materials for Advanced Metallization
Place:Grenoble, France
Start date:6 Mar 2006
pdf:[1.95 MB]

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