University of Bern

Institute of Applied Physics

Publications

Details of Publication IAP ID 2735

Type:Posters
IAP ID:2735
Authors:Matthias Meier, Valerio Romano, Dietmar Bertsch, Nico Onda, Marco Etter, Martin Gutsche, Alex Dommann, Marc-A. Nicolet
Title:Laser Ablation of Amorphous Ta42Si13N45 Thin Films
Conference:Materials for Advanced Metallization
Place:Grenoble, France
Start date:6 Mar 2006
pdf:[1.95 MB]

Webmaster IAP | IAP home